An Improved Head for High Speed Spinner Having a Vacuum Chuck

摘要

A head for a high-speed spinner is characterized by a cylindrical body adapted to be mounted at the distal end of a vertically oriented drive shaft. A vacuum chuck having an upwardly facing chamber is circumscribed by an annular surface for receiving a silicon chip. An ordered array of low-pressure cavities is defined about the periphery of the body and is connected with the chamber via radially extended bores for translating low pressures to the chamber as the head is angularly displaced. A pressure differential is thus established across the chip for securing it to the head.