Programmable Surface Acoustic Wave Detection in Silicon: Design of ProgrammableFilters

摘要

The design and implementation of programmable surface acoustic wave (SAW)detectors in ZnO-SiO2-Si layered structures is explained. An overview is given of the application of programmable filters in radar and communication systems. The fundamentals of SAW techniques are reviewed. The realization of SAW detectors, whose output can be controlled electronically, is investigated. A new active SAW detector composed merely of junction electrodes is presented. The complete monolithic programmable filter is considered. An overview of the electronic circuitry is given.