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Radiation effects in low-dielectric-constant methyl-silsequioxane films

机译：低介电常数甲基倍半硅氧烷薄膜中的辐射效应

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作者
Petkov, M. P.; Lynn, K. G.; Rodbell, K. P.; Volksen, W.; Miller, R. D.;
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年度 2002
页码 1-5
总页数 5
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
DIELECTRICS; METHYL COMPOUNDS; PERMITTIVITY; RADIATION EFFECTS; low-k dielectric radiation effect;

机译：电介质;甲基化合物;介电常数;辐射效应;低k介电辐射效应;

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Radiation effects in low-dielectric-constant methyl-silsequioxane films

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