Processing of O.F.E. copper beam chambers for PEP-II high energy ring

摘要

Using laboratory scale and full size PEP-II vacuum chambers, chemical cleaning, glow discharge and thermal process effects were evaluated using surface analysis by x-ray photoelectron spectroscopy (XPS). These processes were optimized to reduce surface carbon and thereby minimize photodesorption gas loads. The relation of surface carbon to ion dose was investigated and compared for pure argon, 5% oxygen in argon, and pure hydrogen plasmas. Argon incorporation was noted only when the copper was oxidized in the mixed gas. Surfaces, stable in ambient atmosphere, were obtained having surface carbon values less than 10%. These optimized recipes will be used in processing copper vacuum chambers for the PEP-II B-Factory.