Numerical analysis of the ultraprecision machining of copper

摘要

Modeling of the ultraprecision machining process can aid in the understanding of the relative importance of various process parameters and ultimately lead to improved methods of generating ultraprecision surfaces such as those required for metal optics and single crystal microelectronics substrates. Any modeling method should be verified by direct comparison to experimental data. Until recently it has been difficult to accurately measure the cutting edge, or sharpness, of a diamond tool; and therefore, most models have assumed an infinitely sharp cutting tip. With the relatively new technology of the Atomic Force Microscope (AFM), the cutting edge of single crystal diamond tools can be quantitatively described. Ultraprecision machining experiments using an AFM characterized cutting tool and orthogonal geometry have been performed. These experiments have resulted in measured cutting and thrust forces for different depths of cut in copper (Te-Cu: 99.4-99.5% Cu, 0.5-0.6% Te, 4-5 micron grain size, 225 MPa yield strength) with a well characterized diamond tool. By using this actual tool tip geometry the authors have been able to develop a model that can predict cutting and thrust forces for depths of cut on the order of the sharpness of the tool. Forces predicted by this numerical model are compared to the experimentally measured forces.