Enhanced Growth Rate and Silane Utilization in Amorphous Silicon and Nanocrystalline-Silicon Solar Cell Deposition via Gas Phase Additives.

摘要

Thin-film Si photovoltaic modules that have been commercialized use the tandem micromorph structure with an a-Si high-bandgap top cell and a microcrystalline (iCSi) low-bandgap bottom cell showing improved, stabilized performance over previous a-Si-based modules. Several groups have reported devices with over 12% stabilized efficiency, and modules or large-area cells have been produced with stabilized efficiencies of 10%. Original equipment manufacturers Applied Materials and Oerlikon have each sold several a-Si/iCSi tandem module fabrication lines in the past. Many other manufactures have also invested in tandem module production lines.