Hidden Challenges to MEMS Commercialization: Design Realization and Reliability Assurance

摘要

The successful commercialization of MicroElectroMechanical Systems (MEMS) is an essential prerequisite for their implementation in many critical government applications. Several unique challenges must be overcome to achieve this widespread commercialization. Challenges associated with design realization and reliability assurance are discussed, along with approaches taken by Sandia to successfully overcome these challenges.