Use of Reciprocal Lattice Layer Spacing in Electron Backscatter Diffraction Pattern Analysis;Ultramicroscopy

摘要

In the scanning electron microscope (SEM), using electron backscattered diffraction (EBSD), it is possible to measure the spacing of the layers in the reciprocal lattice. These values are of great use in confirming the identification of phases. The technique derives the layer spacing from the HOLZ rings which appear in patterns from many materials. The method adapts results from convergent-beam electron diffraction (CBED) in the transmission electron microscope (TEM). For many materials the measured layer spacing compares well with the calculated layer spacing. A noted exception is for higher atomic number materials. In these cases an extrapolation procedure is described that requires layer spacing measurements at a range of accelerating voltages. This procedure is shown to improves the accuracy of the technique significantly. The application of layer spacing measurements in EBSD is shown to be of use for the analysis of two polytypes of SiC.