Real Time Optics of the Growth of Textured Silicon Films in Photovoltaics. Final Technical Report 1 August 1999-12 August 2002

摘要

Novel optical instruments, including single and dual rotating-compensator multichannel ellipsometers, have been designed and developed to probe the evolution of the microstructure, spectroscopic optical properties, and other materials characteristics during the fabrication and processing of individual thin films and thin-film structures used in photovoltaic devices. These instruments provide a foundation for next-generation process design/control and metrology in existing and future photovoltaics technologies. In this project, the materials system studied in the greatest detail was thin-film silicon, fabricated at low temperatures by plasma-enhanced chemical vapor deposition.