Plasma-Assisted Coevaporation of S and Se for Wide Band Gap Chalcopyrite Photovoltaics. Phase II Annual Report, December 2002-December 2003

摘要

In this work, ITN Energy Systems (ITN) and lower-tier subcontractor Colorado School of Mines (CSM) explore the replacement of the molecular chalcogen precursors during deposition (e.g., Se2 or H2Se) with more reactive chalcogen monomers or radicals (e.g., Se). Molecular species are converted to atomic species in a low-pressure inductively coupled plasma (ICP). Tasks of the proposed program center on development and validation of monatomic chalcogen chemistry, tuning of low-pressure monomer chalcogen sources, and evaluation of plasma-assisted co-evaporation (PACE) for CIGS co-evaporation.