Fabrication of Self-Supported Oxide Targets by Cationic Adsorption in Cellulosic Membranes and Thermal Decomposition

摘要

Techniques for producing relatively durable oxide films of various elements will be described. Areal densities of films produced to date have ranged from 150 mu g/cm exp 2 to 2.5 mg/cm exp 2 , and are virtually transparent. Films produced by this technique were weighed directly and mounted on frames. General parameters for use of this technique will be described. (ERA citation 08:056260)