Novel RF-Plasma System for the Synthesis of Ultrafine, Ultrapure SiC and Si sub 3 N sub 4

摘要

A novel high-temperature plasma tube has been developed that overcomes the meltdown problem of the conventional water- and gas-cooled quartz plasma tubes commonly used. The key feature of this system is the placement of heavy-walled, water-cooled copper fingers inside a quartz mantle to shield the mantle from the intense radiation of the plasma. The copper fingers act as transformers to couple the plasma to the applied rf field. This system has been used to produce ultrafine, ultrapure silicon carbide powder by reaction of silane and methane. Powder of beta -SiC has been obtained with a BET surface area of > 160 m exp 2 /g and a particle size range of 10 to 20 nm. Likewise, powder of silicon nitride has been synthesized by reaction of silane and ammonia in the plasma. The resulting powder is approximately 50% Si sub 3 N sub 4 with a mixture of alpha - and beta -polymorphic forms. Boron carbide has also been successfully synthesized from diborane and methane. (ERA citation 09:006216)