Improved Industrial Humidity Sensors and Control Systems. Dew Point Hygrometer. Phase 1. Final Report

摘要

A capacitive dew point hygrometer was designed, fabricated, and tested for applications in industrial grain drying environments. This report describes the system development and the results of the fabrication and sensor evaluations. The dew point sensor was fabricated on silicon to provide a capacitive condensate detector that could detect liquid water or ice on the surface. The change in capacitance occurs due to the higher dielectric constant of water over air and results in an increase of capacitance from 25 pF dry to 40 pF completely wet. An integrated permalloy resistance temperature device (RTD) was also present on the surface of the sensor. (ERA citation 11:034217)