Absolute multilayer characterization at high spatial resolution via real-time soft x-ray imaging. Revision 1.

摘要

An imaging-based technique has been modeled for its suitability and performance in measuring the spatial distribution of the absolute soft x-ray characterization of flat multilayer mirrors. Such a technique, if implemented experimentally, is anticipated to have substantially higher throughput (wafers/day) than is possible from prevailing non-imaging means. 5 figs.