EXAFS study of sputtered Co/Al multilayers by electron detection: Structural difference due to deposition condition.

摘要

EXAFS measurements and x-ray diffraction analysis have been made on magnetron sputtered Co-Al multilayers with modulation wavelengths of 1 to 2 monolayers and sputtering Ar gas pressure of 3 to 7 mTorr. X-ray diffraction results cannot clearly identify th ...