Evaluation of Carbon Nanotube Thin Films for Optically Transparent Microwave Applications Using On-Wafer Probing of Corbino Disc Test Structures.

摘要

We present a generalized technique, involving the on-wafer probing of Corbino disc test structures, for conveniently evaluating conducting films of arbitrary thickness in terms of complex conductivity and related physical parameters. Using this method, we have electrically characterized partially transparent carbon nanotube thin films at DC and microwave frequencies (including the L-, S- and C-bands). Test structures with disc diameters ranging from approximately 50 m to 500 m and disc-to-concentric-ring gaps ranging from approximately 30 m to 150 m were investigated at temperatures ranging from (295.85 +/- 0.62) K to (396.75 +/- 0.72) K. Additionally, we characterized the thin film in terms of its room temperature optical transmission, at wavelengths ranging from 200 to 2500 nm, in order to evaluate this material as an optically transparent microwave conductor.