All Surface Micromachined Microphone

机译：所有表面微机械麦克风

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

All Surface Micromachined Microphones. Advantages: 1. Freedom of Design, more functionality 2. Very Suitable for Integration with electronics 3. Well-established Commercial Process 4. Foundries. Disadvantages: 1. Small Gaps, damping - solved by Out of Plane Structures 2. Some Assembly Required - solved by Self Assembling.

著录项

作者
Pardo, F.;
展开▼
作者单位

展开▼
年度 1999
页码 1-15
总页数 15
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
Microphones ; Micromachining ; Microsensors ; Integrated circuits ; Acoustic arrays ; Assembly ; Microelectromechanical systems ; Foundries ; Reprints ; Acoustic detectors ; Damping ; Symposia ; Frequency response;

机译：麦克风;微机械加工;微传感器;集成电路;声学阵列;组装;微机电系统;铸造厂;重印;声学探测器;阻尼;专题讨论会;频率响应;

相似文献

外文文献
中文文献
专利

1. A broadband, capacitive, surface-micromachined, omnidirectional microphone with more than 200kHz bandwidth [J] . Michael L. Kuntzman, Neal A. Hall The Journal of the Acoustical Society of America . 2014,第6期

机译：宽带，电容性，表面微加工的全向麦克风，带宽超过200kHz
2. A surface-micromachined capacitive microphone with improved sensitivity [J] . Chang Han Je, Jaewoo Lee, Woo Seok Yang, Journal of Micromechanics and Microengineering . 2013,第5期

机译：表面微加工电容式麦克风，具有更高的灵敏度
3. Silicon microphone based on surface and bulk micromachining [J] . Brauer M., Bever T., Barzen S., Journal of Micromechanics and Microengineering . 2001,第4期

机译：基于表面和整体微加工的硅麦克风
4. A surface micromachined MEMS capacitive microphone with back-plate supporting pillars [C] . Je Chang Han, Lee Jaewoo, Yang Woo Seok, IEEE Sensors . 2013

机译：具有背板支撑柱的表面微加工MEMS电容式麦克风
5. Micromachined microphone array on a chip for turbulent boundary layer measurements. [D] . Krause, Joshua Steven. 2011

机译：芯片上的微机械麦克风阵列，用于湍流边界层测量。
6. Towards a sub 15-dBA optical micromachined microphone [O] . Donghwan Kim, Neal A. Hall -1

机译：迈向15 dBA以下光学微机械麦克风
7. The Novel Sensitivity Improved Surface Micromachined MEMS Microphone with the Center-Hole Membrane [O] . Je Chang Han, Lee Jaewoo, Yang Woo Seok, 2011

机译：具有中心孔膜的新型灵敏度改进的表面微机械MEMS麦克风

All Surface Micromachined Microphone

摘要

著录项

相似文献

相关主题

期刊订阅