Advanced Interferometric Modulators for High Performance Reflective Flat Panel Displays

摘要

This project has focused on the development of several new additions to the class of devices known as Interferometric Modulators or IMods. IMods are MEM structures which, by the incorporation of thin film stacks, utilize the phenomenon of interference to efficiently modulate light. The devices are being developed specifically for application to reflective Flat Panel Displays, though many applications outside this area exist. Three new designs were considered based on their ability to provide improved black and white, and color performance. Two of the designs were eliminated based on the complexity of their fabrication and fundamental processing issues. The third IMod design was evaluated via the fabrication of both static displays (black and white, and full-color) and of black and white test devices. The results were quite encouraging and their generation represents the conclusion of this effort.