Multidisciplinary Research Proposal for MEMS-Based Smart Gas Turbine Engines

摘要

The objective of this program is to develop sensor and actuator array technologies based on microelectromechanical systems (MEMS) for distributed measurement and actuation in harsh environments. Currently MEMS devices are fabricated primarily from silicon, which limits application areas to temperatures below 25 deg C. We are developing silicon carbide (SiC) as a material for MEMS in harsh temperature, corrosive, and erosive environments. To this end, we have focussed a major part of this program on the development of materials and processing techniques required to fabricate SiC-based MEMS structures. This document serves as the final progress report for this program.