Micromachines for Microchips: Bringing the AFM up to Speed

摘要

This Final Phase II SBIR report, developed under contract for topic number DARPA SB992-039, outlines improvements made to the atomic force microscope (AFM) in order to increase its imaging speed 10 to 100 times during standard operation. Faster imaging will allow the AFM to be used in high throughput military and microelectronic manufacturing applications. The developments made under this grant have been commercialized. These products are manufactured and sold in an agreement with Digital Instruments/Veeco. This report outlines the technical achievements made during the entire grant period.