Research Initiative (RI) Proposal to Enhance Oxide MBE Growth through Facilitization of an Ozone Source and Oxygen Resistant Zn Effusion Cell

摘要

There were two primary objectives of this Research Initiative: (1) to purchase and install an oxygen resistant Zn effusion cell to assist with challenges due to oxidation of source cells, and (2) to complete the installation process and facilitization of an existing ozone generation system for our MBE growth chamber. Under the project, both objectives were met. A research scientist in the group, Dr. Huiyong Liu, was trained in the operation of the ozone source, and the MBE system is now ready for ozone growth experiments to determine the effectiveness of the oxide resistant Zn cell and the impact of ozone based oxide semiconductor growth in comparison to the typical oxygen plasma based epitaxy.