Mechanical Testing System for MEMS and Small Scale Samples at Cold and Elevated Temperatures; Final rept. 15 Jun 2006-14 Dec 2007

摘要

A mechanical testing system was acquired by this DURIP grant for mechanical characterization of micron and millimeter-scale specimens at low (> - 150 deg C), and room to moderate temperatures (0-315 deg C). The acquired instrumentation utilizes magneto-mechanical actuation that permits mechanical testing of micron and millimeter size specimens requiring ultra high force resolution (0.5 mN) and fine displacement control (approximately 50 nm), which are not possible with conventional servohydraulic or DC motor based mechanical testing machines. The equipment has been integrated in the PI's laboratory and has already facilitated AFOSR supported research on fracture of silica epoxy nanocomposites. it is expected that it will further be of service in future AFOSR research on small-scale measurements in MEMS and thin films.