Study on Locally Confined Deposition of Si Nanocrystals in High-Aspect- Ratio Si Nano-Pillar Array for Nano-Electronic and Nano-Photonic Applications

摘要

This project established versatile processing techniques for improving the internal and external quantum efficiencies of Si MOSLEDs via detuning the size and density of high-aspect-ratio Si nanorods and buried Si nanospheres.