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THE DESIGN AND USE OF DIFFUSION FILL DEVICES IN ULTRA-HIGH VACUUM APPLICATIONS

机译：超高真空应用中扩散填料装置的设计与应用

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摘要

The properties of a helium fill device (influx rate, purification factor, intrinsic gas load, and switching times) and its application in ultra-high vacuum work are discussed in detail. Several limitations and their remedies are considered and experimental results are given.

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作者
RUDOLF G. BUSER; JOHN J. SULLIVAN;
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年度 1964
页码 1-29
总页数 29
原文格式 PDF
正文语种 eng
中图分类工业技术;
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THE DESIGN AND USE OF DIFFUSION FILL DEVICES IN ULTRA-HIGH VACUUM APPLICATIONS

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