An Investigation for Fabricating and Evaluating the Properties of Chemically Vapor Deposited Alumina and Magnesia

摘要

The chemical vapor deposition technique for aluminum oxide was investigated and transparent, theoretically dense, alpha-aluminum oxide was produced. By varying the deposition conditions, white opaque material could be produced; theta-aluminum oxide could be co-deposited with the alpha and both isotropic and anisotropic aluminum oxide could be produced. (Author)