Scanning Electron Microscopy (A Review of the First Two Years' Work Using the Cambridge 'Stereoscan' Microscope)

摘要

The report is a review of the work carried out in the Materials Section of the Reliability and Measurement Group, using the Cambridge Scanning Electron Microscope. The work done using the instrument covers 'in house' applications, both within the parent Group, and for other Groups within the Establishment; work with contractors and research organisations on contract to the Ministry; and also work for outside industry on a cost shared basis. The report does not attempt to cover all the work done, but reviews in basically chronological order some of the interesting items studied; these are selected to illustrate the scope of the equipment, and show how a breakthrough in microscope technology has been achieved. (Author)