Fabrication and Properties of Organic-Inorganic Nanolaminates Using Molecular and Atomic Layer Deposition Techniques.

摘要

Over the last three years, our AFOSR grant focused on issues related to gas diffusion barriers on flexible polymers. We focused on the fabrication of nanolaminates and alloys using atomic layer deposition (ALD) and molecular layer deposition (MLD) techniques. The goal was to produce gas diffusion barriers on polymers that were flexible and could function as ultrabarriers to prevent H2O permeation. We focused on three key issues: the critical strains for cracking of Al2O3 ALD films; the improvement of flexibility by fabricating ALD/MLD alloys; and the use of MLD films as compliant interlayers.