Application of Nondestructive Testing Techniques to Materials Testing

摘要

A set of new techniques in scanning acoustic and optical microscopy is described. Starting with an acoustic microscope that can directly measure both phase and amplitude, similar techniques have been developed for the scanning optical microscope. These make it possible to measure range to a thousandth of a wavelength. Other techniques involving scanning optical microscopy have been demonstrated which make it possible to carry out profiling of semiconductor circuits. Developments of these methods are now being actively pursued for use in the semiconductor industry. Developments of acoustic technology pioneered on this program have proved extremely important for measuring internal defects in composites and surface cracks on ceramics. Keywords: Aircraft, Composite Materials, Ceramics, Integrated circuitry, Structural members, Phase measurement, Metal films, Epoxy compounds, Fiber optics. JES