Preparation of Superconducting YBa2Cu3Ox Thin Films by Oxygen Annealing of Multilayer Metal Films

摘要

Superconducting thin films consisting perdominantly of Yttrium barium copper oxide have been prepared by oxygen annealing of metal films formed by using electron beam evaporation to deposit a three-layer sequence of Cu, Ba, and Y in nominally stoichiometric proportions, then repeating the sequence five times. For the best superconducting films, which were prepared on yttria-stabilized cubic zirconia substrates, the onset of superconductivity occurred at 94 K and zero resistivity was observed at 72 K. For the best films prepared on sapphire substrates, the corresponding temperatures were 95 and 40 K.