Automated Wide-Band Surface Resistivity Measurements of Resistive Sheets

摘要

A simple and fully automated computer controlled wideband measurement system for characterizing the surface resistivity of electrically thin materials is described. The surface resistivities of various commercially available samples of resistive sheets were measured. The acquired data are compared with the measured dc values and the manufacturer's nominal values as well. Important properties such as sheet uniformity and anisotropy are also discussed.