Time-of-Flight Elastic Recoil Analysis of Ion Beam Modified Nitrocellulose Films

摘要

The erosion properties of nitrocellulose (C6H7N3O11) thin films on Si have beenstudied under exposure to 270 keV H, He, C, and Ar ions. Time-of-flight elastic recoil spectrometry has been applied to determine the atomic composition of the films as a function of deposited charge. All exposed films exhibit an initial removal of N and O consistent with RO-NO2 bond breaking, proceeding at a rate that appears to depend on the density of electronic excitation. Experimental evidence supports the proposition that binary collisions are an important mechanism affecting desorption of the H and C components. The results are consistent with a suggestion that complete volatilization of the film is determined by the nuclear stopping power of the incident ion. jg p4.