Transmission electron microscopy of amorphization and phase transformation beneath indents in Si

摘要

The microstructure beneath indents, with three different tip shapes (spherical. Vickers and Berkovich), in Si was examined using transmission electron microscopy. The focused-ion beam technique was applied to the preparation of specimens for cross-sectional observation. Activation of dislocations, cracking, phase transformation and amorphization were observed. [References: 21]