Applications of the electron backscatter diffraction technique to ceramic materials

摘要

A technique with a relatively high spatial resolution is required for an effective analysis of the microstructure of ceramic materials. The recently developed electron backscatter diffraction (EBSD) technique, which works within a scanning electron microscope, enables a spatially highly resolved study of crystallographic orientations while recording Kikuchi patterns on a user-defined grid. However, such an EBSD texture analysis was until now not often performed on ceramic materials - in contrary, the technique is widely employed in the analysis of metallic materials, including the investigation of various types of steels. The use of ceramics possesses a variety of problems for EBSD investigations like: (i) complicated crystal structure, (ii) difficult surface preparation, and (iii) problems arising from a low conductivity of the ceramic materials. Here, we discuss these problems and present solutions in order to obtain high-quality Kikuchi patterns from such ceramics.