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Ex- and In-situ Metrology Based on the Shack-Hartmann Technique for Sub-nanometric Metrology

机译:基于Shack-Hartmann技术的亚纳米计量异地计量

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摘要

In recent years, there has been growing interest in the design of electron accelerators in order to reduce beam emittance and to increase photon brilliance (from third-generation synchrotron sources to free electron lasers). This has increased the coherent properties of the beam and has opened up new branches of microscopy and spectroscopy at nanometer-length scales. The X-ray nano probe is going to be an important tool for future research, hence there has been substantial research carried out in order to develop nano focusing optics of diffraction-limited performance.
机译:近年来,人们越来越关注电子加速器的设计,以降低电子束的发射并增加光子的亮度(从第三代同步加速器源到自由电子激光器)。这增加了光束的相干特性,并开辟了纳米级显微镜和光谱学的新分支。 X射线纳米探针将成为未来研究的重要工具,因此,为了开发具有衍射极限性能的纳米聚焦光学器件,已经进行了大量研究。

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