Integration of SWNT film into MEMS for a micro-thermoelectric device

摘要

This paper reports the top-down fabrication of carbon nanotube (CNT) thin film on microelectrical mechanical systems (MEMS) and the characterization of the thermoelectric coefficients of aligned single-walled carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapor deposition (CVD), a process known as 'super-growth'. CNT film was then condensed, manually maneuvered, and conveniently patterned by electron beam (EB) lithography to form desirable shapes. We demonstrate this process by patterning an array of Au-CNT thermocouples; measurement under room temperature conditions reveals the Seebeck coefficient of aligned SWNT film to be 18-20νVC ~(- 1).