A new partially integrated magnetometer based on continuous-wave proton nuclear magnetic resonance (NMR) has been realizedand and characterized. Planar coils on a glass substrate of diameter down to 2 mm bonded to a CMOS IC for NMR signal detection and amplification, with cis-polyisoprene samples of volume down to 1 mm3, have been used to show the feasibility of a fully integrated NMR magnetometer. The sensor has been tested at static magnetic fields between 1 and 2 T. A precision better than 5 ppm (at 1.4 T) is achieved. # 1998 Elsevier Science S.A. All rights reserved.
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