FUEL DROPLET NOZZLE ASSEMBLY

摘要

The present invention relates to a fuel droplet nozzle assembly for producing fuel droplets and. an associated method of producing fuel droplets. The fuel dropk-t nozzle assembly may form part of a droplet generator assembly within a laser produced plasma (LPP) radiation source. Such an LPP radiation source may produce extreme ultraviolet (EUV) radiation and may form pan of, or may supply radiation to, a lithographic apparatus. A lithographic apparatus is a machine constructed to apply a desired pattern onto a substrate. A lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs), A lithographic apparatus may, for example, project a pattern at a patterning device (e.g., a mask) onto a layer of radiation-sensitive material (resist) provided on a substrate.