Characteristic analysis and design of a small size Rotary Ultrasonic Motor using the Cutting Method

摘要

The exact analysis of the piezoelectric motor has been impossible to the present time, although many researchers have proposed various kinds of analysis method for the piezoelectric motor using numerical method or analytic method. Also, the arranged design method has not been suggested for the Ultra-Sonic Motor (USM) taking the characteristic into account. In order to address these problems, we propose the analysis and design method for the USM using analytic method combined with numerical method. This method was named as the Cutting Method (CM) in this paper. The 8.5[mm] diameter Rotary Ultra-Sonic Motor (RUSM) is developed using the CM to verify the suggested method and for the demand of small actuators in industry. Finally, the proposed analysis and design method was validated by comparing its outcomes with the experimental data. For the vibrator of the proposed 8.5[mm] diameter RUSM, four kinds of comb-tooth structures were prototyped in this research. Hence, the relation between the speed of the motor and the number of teeth is revealed for the first time. This is noteworthy because the tooth design method has not been proposed and because this result also verified the proposed CM.