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机译:Thermally induced interfacial interactions between. various metal substrates and a-SiC thin films deposited by a polymer-source chemical vapor deposition
Univ Sherbrooke, Sherbrooke, PQ J1K 2R1, Canada;
SiXtron Adv Mat Inc, Sherbrooke, PQ J1J 2E8, Canada;
INRS EMT, Inst Natl Rech Sci, Varennes, PQ J3X 1S2, CanadaBishops Univ, Lennoxville, PQ J1M 1Z7, Canada;
interfaces; carbides; polymers; semiconductors; SOLID-STATE REACTION; SILICON-CARBIDE; ELECTRICAL-PROPERTIES; DIFFUSION PATH; CHEMISTRY; MICROSTRUCTURE; TITANIUM; DENSITY; PHYSICS;