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机译:INVESTIGATION OF THE CHEMICAL MECHANISMS OF TA(110)/TA(110)-SUBOXIDE ETCH SELECTIVITY USING CL-2 MOLECULAR BEAMS
XEROX CORP 800 PHILLIPS RD 114-41D WEBSTER NY 14580 USA;
Chemisorption; Chlorine; Etching; Ion etching; Low energy electron diffraction (leed); Low index single crystal surfaces; Molecule-solid reactions; Oxidation; Oxygen; Tantalum; X-ray photoelectron spectroscopy; Sputter deposited tantalum; Adsorption; Surfaces; Oxide; Films;