METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING

摘要

Systems, methods, and computer programs for reducing movement of a patterning device on a patterning device holder during acceleration of the patterning device holder. In an embodiment, a patterning device holder includes a chuck configured to releasably hold and support the patterning device during an imaging operation of the lithographic imaging apparatus. It further includes an actuator configured to apply a holding force to an edge of the patterning device held and supported by the patterning device holder, the holding force being opposed to an inertial force on the patterning device when the patterning device holder is accelerated, the actuator including a fine-stroke portion and a tip portion, wherein the actuator is slidingly mounted on a guide. A locking mechanism is configured to selectively hold the actuator in place relative to the patterning device, and the actuator is mounted such that the tip portion of the actuator may be controllably positioned to be in a pushing position where the tip portion is engaged with the edge of the patterning device, and to be in a disengaged position where the tip portion is not engaged with the edge of the patterning device, and is movable along the guide from the disengaged position to the pushing position by inertial forces due to acceleration of the patterning device holder. In an embodiment, a patterning device transport system for use in holding and moving a patterning device in a lithographic imaging apparatus includes a patterning device holder, including a chuck configured to releasably hold and support the patterning device during an imaging operation of the lithographic imaging apparatus. An actuator is configured to apply a holding force to an edge of the patterning device held and supported by the patterning device holder, the holding force being opposed to.