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SYSTEM

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摘要

It is an object of the presemt disclosure to provide embodiments that support improvement of throughput or other characteristies of charged-particle assessment tools. According to a first aspect of the invention, there is provided an objective lens array assembly for an electron-optical system of a charged-particle assessment tool, the objective lens array assembly being configured to focus a multi-beam on a sample and comprising: an objective lens array, each objective lens being configured to projeet a respective sub-beam of the multi-beam onto the sample;and a control lens array associated with the objective lens array and positioned up-beam of the objective lens array, the control lenses being configured to pre-focus the sub-beams.

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  • 来源
    《Research Disclosure》 |2021年第691期|2326-2327|共2页
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  • 正文语种 英语
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