CONCURRENT AUTO FOCUS AND LOCAL ALIGNMENT METHODOLOGY

摘要

[0003] The embodiments provided herein disclose a particle beam inspection apparatus, and more particularly, iin inspection method of concurrent focus and image alignment of an inspection image. [0004| Some embodiments provide a method for enhancing an inspection image. The method comprises acquiring a plurality of inspection images according to a plurality of locus conditions for an area of a sample containing a pattern, determining whether an inspection image of the plurality of inspection images has a focus index within a first threshold range, and in response to a determination that the inspection image has a focus index within the first threshold range, performing an image alignment using the inspection image.