More than 130 years have passed since Drude published the first paper on ellipsometry. Spectroscopic ellipsometry has progressed rapidly in the last quarter century and is now widely used not only for precise film thickness measurements but also for the evaluation of optical properties of film materials over a wide wavelength range. This paper reviews spectroscopic ellipsometry with expanded measurement wavelength range, and introduces examples of its application to the evaluation of optical properties of thin-film samples.
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