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Movable or flexible walls

机译:Movable or flexible walls

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摘要

A cleanroom is a pre-constructed isolated, contamination controlled, and actively cleansed space in which scientific research or industrial production occurs. For example, a cleanroom may be used in the industrial production of nanoscale processes, such as for semiconductor manufacturing. A cleanroom may require a low concentration of airborne particles such as dust, airborne organisms, or vaporized particles so as to minimize contamination of the manufactured product.

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    《Research Disclosure》 |2022年第696期|407-407|共1页
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