In positive pressure delivery applications, the VAC cylinder can be optimized by selecting the appropriate outlet set point pressure and RFO sizing. This flexibility can lower the risks normally associated with specialty gas installations. Delivery characteristics inherent to three gas sources - SDS, SAGE, and VAC - to traditional high-pressure technology are compared in Table 3. As the materials used in semiconductor processes continue to diversify, improvements in gas handling will facilitate the introduction of new, better, specialty gases that will help improve yields, OEE, and device performance.
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