Synthesis of Pentafluorosulfanyl Trifluorovinyl Ether and Its Facile Rearrangement to Difluoro(pentafluorosulfanyl)acetyl Fluoride

摘要

Amorphous fluoropolymers,such as teflon AF,hyflon AD,and cytop,have attractive properties as optical materials for use in a variety of applications.However,their application as soft polymer pellicles in 157-nm microlithography failed because of photochemical degradation.