Coatings produced in the near-earth orbit and prospects for using them in microelectronics

摘要

Feasibility of development of the electron-beam space technology of thin coating deposition for needs of microelectronics is analyzed. It is shown, that the expediency and promising future of the integrated circuits in space environment are stipulated by its favourable effect on the properties of obtained coatings, on the one hand, and by high requirements to structural purity of materials, used for micro- and nanoelectric devices of new generation, on the other hand.