スペックル干渉計測に基づく三軸方向に同一測定感度をもっ三次元変形計測法の開発

摘要

Speckle interferometry is a useful deformation measurement method concerning objects with rough surfaces. The method using only two speckle patterns before and after a deformation has been proposed in ESPI by using Fourier transform. Some three-dimensional deformation measurement methods based on speckle interferometry have been proposed. However, the sensitivities of conventional methods in directions of three axes are not generally same. In this paper, a new method of which sensitivities in three directions are same is proposed. The new method employed a spatial frequency multiplexing technique that permits simultaneous recording of all the components of three-dimensional deformation with only one camera. The validity of novel method is confirmed by experimental results concerning an in-plane and an out-of-plane deformation.