Catalytic CVD-growth of array of multiwall carbon nanotubes on initially amorphous film Co-Zr-N-O

摘要

The possibility of formation of arrays of multiwall carbon nanotubes on catalyst-containing amorphous thin film Co-Zr-N-O with low content of Co (similar to 15 at.%) by chemical vapor deposition has been demonstrated. On heating the amorphous alloy crystallizes, whereby the faceted crystal clusters of cobalt are formed on the surface. The rest of the film is cobalt depleted. The growth of CNT occurs on cobalt clusters. When using acetylene at the substrate temperature of 650 degrees C the array of 12 mu m high CNT is formed after 2 min of growing. The diameter of CNT in the array varies in the range 3-11 nm. CNTs with the diameter of 5-8 nm prevail. CNT growth process on a thin film of Co-Zr-N-O is low sensitive to the thickness of the film, making it technically attractive. (C) 2016 Published by Elsevier B.V.